Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10325801 | Mounting table system, substrate processing apparatus, and temperature control method | Tadashi Mitsunaga, Tetsuya Miyashita, Naoki Watanabe | 2019-06-18 |
| 10189230 | Method for forming copper film | Hiroyuki Toshima, Atsushi Shimada, Tatsuo Hirasawa, Shinji Furukawa | 2019-01-29 |