Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10325801 | Mounting table system, substrate processing apparatus, and temperature control method | Tetsuya Miyashita, Tatsuo Hatano, Naoki Watanabe | 2019-06-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10325801 | Mounting table system, substrate processing apparatus, and temperature control method | Tetsuya Miyashita, Tatsuo Hatano, Naoki Watanabe | 2019-06-18 |