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Tatsuo Hirasawa

TL Tokyo Electron Limited: 2 patents #91 of 763Top 15%
Overall (2019): #115,760 of 560,194Top 25%
2
Patents 2019

Issued Patents 2019

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10309005 Deposition device and deposition method Yasuhiko Kojima, Hiroshi Sone, Atsushi Gomi, Kanto Nakamura, Toru Kitada +6 more 2019-06-04
10189230 Method for forming copper film Hiroyuki Toshima, Atsushi Shimada, Tatsuo Hatano, Shinji Furukawa 2019-01-29