Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468237 | Substrate processing apparatus | Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Masamichi Hara, Naoyuki Suzuki +2 more | 2019-11-05 |
| 10309005 | Deposition device and deposition method | Yasuhiko Kojima, Hiroshi Sone, Kanto Nakamura, Toru Kitada, Yasunobu Suzuki +6 more | 2019-06-04 |