Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468237 | Substrate processing apparatus | Atsushi Gomi, Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Masamichi Hara +2 more | 2019-11-05 |
| 10392688 | Film forming apparatus | Junichi Takei, Tetsuya Miyashita | 2019-08-27 |
| 10381258 | Apparatus of processing workpiece in depressurized space | Takuya UMISE, Hiroshi Sone | 2019-08-13 |
| 10254693 | Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member | Hiroyuki Yokohara, Shinji Orimoto, Hiroshi Sone | 2019-04-09 |