HY

Hiroyuki Yokohara

TL Tokyo Electron Limited: 1 patents #275 of 763Top 40%
Overall (2019): #443,110 of 560,194Top 80%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10254693 Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member Shinji Orimoto, Hiroshi Sone, Naoyuki Suzuki 2019-04-09