Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381258 | Apparatus of processing workpiece in depressurized space | Takuya UMISE, Naoyuki Suzuki | 2019-08-13 |
| 10309005 | Deposition device and deposition method | Yasuhiko Kojima, Atsushi Gomi, Kanto Nakamura, Toru Kitada, Yasunobu Suzuki +6 more | 2019-06-04 |
| 10254693 | Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member | Hiroyuki Yokohara, Shinji Orimoto, Naoyuki Suzuki | 2019-04-09 |