Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468237 | Substrate processing apparatus | Atsushi Gomi, Tetsuya Miyashita, Koji Maeda, Masamichi Hara, Naoyuki Suzuki +2 more | 2019-11-05 |
| 10189230 | Method for forming copper film | Hiroyuki Toshima, Atsushi Shimada, Tatsuo Hirasawa, Tatsuo Hatano | 2019-01-29 |