Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10486208 | Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium | Nobuhiro Ogata, Jiro Higashijima, Yusuke Hashimoto, Kazuhiro Aiura | 2019-11-26 |
| 10460962 | Substrate processing apparatus | Terufumi Wakiyama | 2019-10-29 |
| 10297473 | Liquid processing apparatus | Terufumi Wakiyama, Jiro Higashijima | 2019-05-21 |
| 10276425 | Substrate processing system | Terufumi Wakiyama, Jiro Higashijima, Satoshi Biwa | 2019-04-30 |