Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10486208 | Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium | Norihiro Ito, Jiro Higashijima, Yusuke Hashimoto, Kazuhiro Aiura | 2019-11-26 |
| 10475671 | Substrate processing apparatus and method of cleaning substrate processing apparatus | Jiro Higashijima, Yusuke Hashimoto | 2019-11-12 |