Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10486208 | Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium | Nobuhiro Ogata, Norihiro Ito, Yusuke Hashimoto, Kazuhiro Aiura | 2019-11-26 |
| 10475671 | Substrate processing apparatus and method of cleaning substrate processing apparatus | Nobuhiro Ogata, Yusuke Hashimoto | 2019-11-12 |
| 10297473 | Liquid processing apparatus | Terufumi Wakiyama, Norihiro Ito | 2019-05-21 |
| 10276425 | Substrate processing system | Terufumi Wakiyama, Norihiro Ito, Satoshi Biwa | 2019-04-30 |