Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381246 | Substrate processing apparatus | Satoshi Okamura | 2019-08-13 |
| 10276425 | Substrate processing system | Terufumi Wakiyama, Norihiro Ito, Jiro Higashijima | 2019-04-30 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381246 | Substrate processing apparatus | Satoshi Okamura | 2019-08-13 |
| 10276425 | Substrate processing system | Terufumi Wakiyama, Norihiro Ito, Jiro Higashijima | 2019-04-30 |