Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460962 | Substrate processing apparatus | Norihiro Ito | 2019-10-29 |
| 10297473 | Liquid processing apparatus | Norihiro Ito, Jiro Higashijima | 2019-05-21 |
| 10276425 | Substrate processing system | Norihiro Ito, Jiro Higashijima, Satoshi Biwa | 2019-04-30 |