Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10486208 | Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium | Nobuhiro Ogata, Norihiro Ito, Jiro Higashijima, Yusuke Hashimoto | 2019-11-26 |