Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10331049 | Substrate cleaning device and substrate processing apparatus including the same | Hiromi Murachi, Ryuichi Yoshida, Koji Nishiyama, Chikara Sagae | 2019-06-25 |
| 10236200 | Exposure device and substrate processing apparatus | Tadashi Miyagi, Koji Nishi | 2019-03-19 |
| 10214814 | Substrate treating apparatus and treatment gas supplying nozzle | Yasuhiro Fukumoto, Koji Nishi, Shigehiro Goto, Atsushi Tanaka, Kenichiro Jo | 2019-02-26 |