Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10214814 | Substrate treating apparatus and treatment gas supplying nozzle | Yasuhiro Fukumoto, Koji Nishi, Toru Momma, Atsushi Tanaka, Kenichiro Jo | 2019-02-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10214814 | Substrate treating apparatus and treatment gas supplying nozzle | Yasuhiro Fukumoto, Koji Nishi, Toru Momma, Atsushi Tanaka, Kenichiro Jo | 2019-02-26 |