Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444636 | Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method | Tomohiro Matsuo, Takafumi Oki, Masaya Asai, Masahiko Harumoto, Yuji Tanaka +1 more | 2019-10-15 |
| 10401736 | Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method | Tomohiro Matsuo, Takafumi Oki, Masaya Asai, Masahiko Harumoto, Yuji Tanaka +1 more | 2019-09-03 |
| 10214814 | Substrate treating apparatus and treatment gas supplying nozzle | Koji Nishi, Toru Momma, Shigehiro Goto, Atsushi Tanaka, Kenichiro Jo | 2019-02-26 |