Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444636 | Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method | Tomohiro Matsuo, Yasuhiro Fukumoto, Masaya Asai, Masahiko Harumoto, Yuji Tanaka +1 more | 2019-10-15 |
| 10401736 | Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method | Tomohiro Matsuo, Yasuhiro Fukumoto, Masaya Asai, Masahiko Harumoto, Yuji Tanaka +1 more | 2019-09-03 |