Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444636 | Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method | Tomohiro Matsuo, Yasuhiro Fukumoto, Takafumi Oki, Masahiko Harumoto, Yuji Tanaka +1 more | 2019-10-15 |
| 10401736 | Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method | Tomohiro Matsuo, Yasuhiro Fukumoto, Takafumi Oki, Masahiko Harumoto, Yuji Tanaka +1 more | 2019-09-03 |
| 10395942 | Etching device, substrate processing apparatus, etching method and substrate processing method | Masahiko Harumoto, Koji Kaneyama, Yuji Tanaka | 2019-08-27 |
| 10331034 | Substrate processing apparatus and substrate processing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2019-06-25 |