Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395942 | Etching device, substrate processing apparatus, etching method and substrate processing method | Masahiko Harumoto, Yuji Tanaka, Masaya Asai | 2019-08-27 |
| 10331034 | Substrate processing apparatus and substrate processing method | Yuji Tanaka, Masaya Asai, Masahiko Harumoto | 2019-06-25 |
| 10185219 | Developing method | Yuji Tanaka, Tadashi Miyagi, Masahiko Harumoto | 2019-01-22 |