Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10236200 | Exposure device and substrate processing apparatus | Koji Nishi, Toru Momma | 2019-03-19 |
| 10185219 | Developing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2019-01-22 |