Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10331049 | Substrate cleaning device and substrate processing apparatus including the same | Hiromi Murachi, Koji Nishiyama, Toru Momma, Chikara Sagae | 2019-06-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10331049 | Substrate cleaning device and substrate processing apparatus including the same | Hiromi Murachi, Koji Nishiyama, Toru Momma, Chikara Sagae | 2019-06-25 |