Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10331049 | Substrate cleaning device and substrate processing apparatus including the same | Hiromi Murachi, Ryuichi Yoshida, Toru Momma, Chikara Sagae | 2019-06-25 |
| 10281014 | Auto tensioner | Satoshi Oishi, Tetsuo Yoneda | 2019-05-07 |
| 10283380 | Substrate processing apparatus | — | 2019-05-07 |
| 10276365 | Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method | — | 2019-04-30 |