Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522332 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sunggil Kang, Kwangyoub Heo, Kyuhee Han | 2019-12-31 |
| 10410874 | Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same | Beom Jin Yoo, Kwang Heo, Jehun Woo, Sang Heon Lee, Masahiko Tomita +1 more | 2019-09-10 |
| 10347468 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sunggil Kang, Kwangyoub Heo, Kyuhee Han | 2019-07-09 |