Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522332 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sunggil Kang, Sang Ki Nam, Kwangyoub Heo | 2019-12-31 |
| 10381461 | Method of forming a semiconductor device with an injector having first and second outlets | Namjin Cho, Yeontae Kim, Keesoo PARK, Eunsok Choi | 2019-08-13 |
| 10347468 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sunggil Kang, Sang Ki Nam, Kwangyoub Heo | 2019-07-09 |
| 10199325 | Semiconductor device and method of fabricating the same | Taejin Yim, Jongmin Baek, Deokyoung Jung, Byunghee Kim, Jiyoung Kim +2 more | 2019-02-05 |