Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522332 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Sunggil Kang, Sang Ki Nam, Kwangyoub Heo, Kyuhee Han | 2019-12-31 |
| 10347468 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Sunggil Kang, Sang Ki Nam, Kwangyoub Heo, Kyuhee Han | 2019-07-09 |