Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410874 | Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same | Beom Jin Yoo, Sang Ki Nam, Kwang Heo, Sang Heon Lee, Masahiko Tomita +1 more | 2019-09-10 |