Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418250 | Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method | Gon-jun Kim, Yuri Barsukov, Vladimir Volynets, Dali Liu, Sang Jin An +2 more | 2019-09-17 |
| 10410874 | Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same | Sang Ki Nam, Kwang Heo, Jehun Woo, Sang Heon Lee, Masahiko Tomita +1 more | 2019-09-10 |