Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418250 | Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method | Gon-jun Kim, Yuri Barsukov, Dali Liu, Sang Jin An, Beom Jin Yoo +2 more | 2019-09-17 |
| 10249485 | Pulsed plasma analyzer and method for analyzing the same | Protopopov Vladimir, Young Do Kim, Yuri Barsukov, Sang Heon Lee, Sung Ho JANG | 2019-04-02 |