Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418250 | Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method | Gon-jun Kim, Yuri Barsukov, Vladimir Volynets, Dali Liu, Beom Jin Yoo +2 more | 2019-09-17 |