Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410874 | Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same | Beom Jin Yoo, Sang Ki Nam, Kwang Heo, Jehun Woo, Sang Heon Lee +1 more | 2019-09-10 |
| 10312101 | Substrate processing method and substrate processing apparatus | Shuji Moriya | 2019-06-04 |