Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10328465 | Substrate processing apparatus and substrate processing method | Yu Ishii, Hiroyuki Kawasaki, Kenichi Nagaoka, Kenya Ito, Masako Kodera +1 more | 2019-06-25 |
| 10249034 | Substrate defect inspection apparatus, method of adjusting sensitivity parameter value for substrate defect inspection, and non-transitory storage medium | Yasuhiro Kitada, Izumi Hasegawa, Kousuke NAKAYAMA, Tadashi Nishiyama | 2019-04-02 |
| D843076 | Scraper | — | 2019-03-12 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Kazuyuki Mitsuoka, Mitsuaki Iwashita +4 more | 2019-02-05 |