Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10224202 | Forming method of hard mask, forming apparatus of hard mask and recording medium | Takeshi Nagao, Nobutaka Mizutani, Takashi Tanaka, Koichi Yatsuda, Kazutoshi Iwai +1 more | 2019-03-05 |
| 10224208 | Plating method and recording medium | Nobutaka Mizutani, Takashi Tanaka | 2019-03-05 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +4 more | 2019-02-05 |