Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10325780 | Method of manufacturing semiconductor device | Takashi Hayakawa, Tatsuya Yamaguchi | 2019-06-18 |
| 10224202 | Forming method of hard mask, forming apparatus of hard mask and recording medium | Mitsuaki Iwashita, Takeshi Nagao, Nobutaka Mizutani, Takashi Tanaka, Kazutoshi Iwai +1 more | 2019-03-05 |