Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490405 | Semiconductor device manufacturing method, substrate processing apparatus and vacuum processing apparatus | Reiji Niino, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2019-11-26 |
| 10474285 | Controller, input device, input system, display apparatus, and control method | Takahiro Kumada, Minoru Hirashima, Yoshihiro Nakao | 2019-11-12 |
| 10446438 | Method of manufacturing semiconductor device | Reiji Niino, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2019-10-15 |
| 10431479 | Heat treatment apparatus and temperature control method | Kazuteru Obara, Yasuaki Kikuchi, Koji Yoshii | 2019-10-01 |
| 10359881 | Control device, input system, and control method | Hironobu MOROFUJI | 2019-07-23 |
| 10325780 | Method of manufacturing semiconductor device | Koichi Yatsuda, Takashi Hayakawa | 2019-06-18 |