Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431479 | Heat treatment apparatus and temperature control method | Tatsuya Yamaguchi, Kazuteru Obara, Yasuaki Kikuchi | 2019-10-01 |
| 10385453 | Film forming apparatus | Masato Yonezawa, Shigehiro Miura, Hiroyuki Akama | 2019-08-20 |