Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480067 | Film deposition method | Hitoshi Kato, Masahiro Murata, Jun Sato | 2019-11-19 |
| 10385453 | Film forming apparatus | Masato Yonezawa, Hiroyuki Akama, Koji Yoshii | 2019-08-20 |
| 10358720 | Substrate processing apparatus | — | 2019-07-23 |
| 10287675 | Film deposition method | — | 2019-05-14 |
| 10217642 | Substrate processing apparatus, substrate processing method and substrate holding member | Jun Sato | 2019-02-26 |
| 10202687 | Substrate processing method and substrate processing apparatus | Jun Sato | 2019-02-12 |