Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480067 | Film deposition method | Masahiro Murata, Jun Sato, Shigehiro Miura | 2019-11-19 |
| 10246775 | Film forming apparatus, method of forming film, and storage medium | — | 2019-04-02 |
| 10221480 | Substrate processing apparatus and substrate processing method | Yukio Ohizumi, Manabu Honma | 2019-03-05 |