Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490405 | Semiconductor device manufacturing method, substrate processing apparatus and vacuum processing apparatus | Tatsuya Yamaguchi, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2019-11-26 |
| 10446438 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2019-10-15 |