Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10224202 | Forming method of hard mask, forming apparatus of hard mask and recording medium | Mitsuaki Iwashita, Nobutaka Mizutani, Takashi Tanaka, Koichi Yatsuda, Kazutoshi Iwai +1 more | 2019-03-05 |