Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10207349 | High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container | Gen You, Hiroki Ohno, Takehiko Orii, Takayuki Toshima, Hiroaki Inadomi | 2019-02-19 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Mitsuaki Iwashita +4 more | 2019-02-05 |