Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10347482 | Substrate processing apparatus, substrate processing method, and storage medium with program stored therein for executing substrate processing method | Shoichi Terada, Junji Nakamura | 2019-07-09 |
| 10333062 | Substrate liquid processing method, substrate liquid processing apparatus, and storage medium | Yasushi Fujii | 2019-06-25 |
| 10207349 | High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container | Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takehiko Orii, Hiroaki Inadomi | 2019-02-19 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +4 more | 2019-02-05 |