Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504718 | Substrate processing apparatus, substrate processing method, and storage medium | Keisuke Egashira, Gentaro Goshi, Yosuke Kawabuchi, Shotaro Kitayama, Hiroshi Marumoto +3 more | 2019-12-10 |
| 10395950 | Substrate processing apparatus, substrate processing method, and recording medium | Gentaro Goshi, Keisuke Egashira, Yosuke Kawabuchi, Hiromi Kiyose, Takuro Masuzumi +3 more | 2019-08-27 |
| 10207349 | High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container | Kazuyuki Mitsuoka, Gen You, Takehiko Orii, Takayuki Toshima, Hiroaki Inadomi | 2019-02-19 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +4 more | 2019-02-05 |