Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10328465 | Substrate processing apparatus and substrate processing method | Yu Ishii, Hiroyuki Kawasaki, Kenichi Nagaoka, Kenya Ito, Hiroshi Tomita +1 more | 2019-06-25 |
| 10256314 | Semiconductor device | Tomoko Matsudai | 2019-04-09 |