Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10458020 | Substrate processing apparatus and substrate processing method | Fong-Jie Du, Makoto Kashiwagi | 2019-10-29 |
| 10376929 | Apparatus and method for polishing a surface of a substrate | Masayuki Nakanishi, Keisuke Uchiyama | 2019-08-13 |
| 10328465 | Substrate processing apparatus and substrate processing method | Hiroyuki Kawasaki, Kenichi Nagaoka, Kenya Ito, Masako Kodera, Hiroshi Tomita +1 more | 2019-06-25 |
| D845568 | Pad holder for polishing apparatus | Kenya Ito, Hirohiko Ueda | 2019-04-09 |