Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10458020 | Substrate processing apparatus and substrate processing method | Yu Ishii, Fong-Jie Du | 2019-10-29 |
| 10427269 | Polishing apparatus and polishing method | Michiyoshi YAMASHITA | 2019-10-01 |
| 10227926 | Exhaust gas abatement system | Kazumasa HOSOTANI, Toyoji Shinohara, Kohtaro Kawamura | 2019-03-12 |