Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10249034 | Substrate defect inspection apparatus, method of adjusting sensitivity parameter value for substrate defect inspection, and non-transitory storage medium | Izumi Hasegawa, Hiroshi Tomita, Kousuke NAKAYAMA, Tadashi Nishiyama | 2019-04-02 |