Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468221 | Shadow frame with sides having a varied profile for improved deposition uniformity | Gaku Furuta, Soo Young Choi, Yi Cui, Robin L. Tiner, Jinhyun CHO +1 more | 2019-11-05 |
| 10453718 | Slit valve door with moving mating part | Mehran Behdjat, Shinichi Kurita, John M. White, Makoto Inagawa | 2019-10-22 |
| 10312058 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-06-04 |
| 10312475 | CVD thin film stress control method for display application | Tae Kyung Won, Soo Young Choi, Sanjay Yadav, Carl A. Sorensen, Chien-Teh Kao +1 more | 2019-06-04 |
| 10262837 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-04-16 |