Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10278501 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Paul B. Reuter, Izya Kremerman, Jeffrey C. Hudgens +1 more | 2019-05-07 |
| 10234261 | Fast and continuous eddy-current metrology of a conductive film | Edward W. Budiarto, Dmitry A. Dzilno, Todd Egan, Jeffrey C. Hudgens | 2019-03-19 |
| 10196845 | Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal | John Mazzocco | 2019-02-05 |
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2019-01-29 |