Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468282 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeff Salinas, Imad Yousif, Aniruddha Pal | 2019-11-05 |
| 10453726 | Electronic device manufacturing load port apparatus, systems, and methods | David Blahnik, Luke Bonecutter, Douglas B. Baumgarten | 2019-10-22 |
| 10453694 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Imad Yousif, Aniruddha Pal | 2019-10-22 |
| 10446428 | Load port operation in electronic device manufacturing apparatus, systems, and methods | — | 2019-10-15 |
| 10381247 | Gas systems and methods for chamber ports | Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Angela Rose Sico, Michael Kuchar +2 more | 2019-08-13 |
| 10278501 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Nir Merry, Izya Kremerman, Jeffrey C. Hudgens +1 more | 2019-05-07 |
| 10276354 | Segmented focus ring assembly | Jared Ahmad Lee | 2019-04-30 |
| 10262884 | Systems, apparatus, and methods for an improved load port | Luke Bonecutter, David Blahnik | 2019-04-16 |
| 10204805 | Thin heated substrate support | Imad Yousif, Martin Jeffrey Salinas, Aniruddha Pal, Jared Ahmad Lee | 2019-02-12 |